Journal of Micro/Nanopatterning, Materials, and Metrology

Journal of Micro/Nanopatterning, Materials, and Metrology is a peer-reviewed scientific journal published quarterly by SPIE. It covers science, development, and practice of micro and nanofabrication processes and metrology.^[1] Established in 2002 under the name Journal of Microlithography, Microfabrication, and Microsystems, it was subsequently retitled to Journal of Micro/Nanolithography, MEMS, and MOEMS in 2007. The journal title was changed to its current name in 2021.^[2]

Journal of Micro/Nanopatterning, Materials, and Metrology

Discipline	Microlithography, nanolithography, metrology
Language	English
Edited by	Harry Levinson
Publication details
Former name(s)	Journal of Microlithography, Microfabrication, and Microsystems (2002–2006) Journal of Micro/Nanolithography, MEMS, and MOEMS (2007–2020)
History	2002–present
Publisher	SPIE
Frequency	Quarterly
Impact factor	3.4 (2023)
Standard abbreviations ISO 4 (alt) · Bluebook (alt) NLM (alt) · MathSciNet (alt )
ISO 4	J. Micro/Nanopatterning Mater. Metrol.
Indexing CODEN (alt · alt2) · JSTOR (alt) · LCCN (alt) MIAR · NLM (alt) · Scopus · W&L
CODEN	JMMMIH
ISSN	1932-5150 (print) 2708-8340 (web)
OCLC no.	1249108189
Links
Journal homepage Online access Online archive

The editor-in-chief of the journal is Harry Levinson (HJL Lithography).^[1]

Abstracting and indexing

The journal is abstracted and indexed in:

• Current Contents/Electronics & Telecommunications Collection^[3]
• Current Contents/Engineering, Computing & Technology^[3]
• Current Contents/Physical, Chemical & Earth Sciences^[3]
• EBSCO databases^[4]
• Ei Compendex^[5]
• Inspec^[6]
• Science Citation Index Expanded^[3]
• Scopus^[7]

According to the Journal Citation Reports, the journal has a 2023 impact factor of 3.4.^[8]