微技术（英语：Micro-technology）包含了微机电感测和控制、驱动元件制程开发技术、微机电系统整合技术、射频(RF MEMS)、光学（Optical MEMS）、生物医学（Bio MEMS）、电脑与周边（Computer Peripheral MEMS）微机电系统研究[1][2]。
参考
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