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Axcelis Technologies

American semiconductor equipment manufacturer From Wikipedia, the free encyclopedia

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Axcelis Technologies, Inc. has been providing innovative, high-productivity solutions for the semiconductor industry for over 45 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. The company was founded in 1978 and is headquartered in Beverly, Massachusetts, United States.

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In 2000, Eaton Corporation spun off its semiconductor manufacturing equipment business as Axcelis Technologies.[5]

In October 2025, Axcelis and Veeco agreed to merge in an all-stock transaction valued at approximately $4.4 billion, with Axcelis shareholders owning about 58% and Veeco shareholders about 42% of the combined company.[6]

For a complete history of the company's 45+ years of innovation, visit https://www.axcelis.com/about/our-history/

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