Remote plasma

A remote plasma (also downstream plasma or afterglow plasma) is a plasma processing method in which the plasma and material interaction occurs at a location remote from the plasma in the plasma afterglow.^[1][2]

Remote plasma system.

See also

• Chemical vapor deposition
• Corona treatment
• Physical vapor deposition
• Plasma activation
• Plasma chemistry
• Plasma cleaning
• Plasma-activated bonding
• Reactive ion etching