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Yttrium oxyfluoride
Chemical compound From Wikipedia, the free encyclopedia
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Yttrium oxyfluoride is an inorganic chemical compound with the formula YOF.[2] Under normal conditions, the compound is a colorless solid.[3]
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Synthesis
Summarize
Perspective
Yttrium oxyfluoride may be formed in the decomposition of crystalline hydrate of yttrium fluoride upon heating to 900 °C in a vacuum:
Yttrium oxyfluoride can also be made by hydrolysis of yttrium fluoride with superheated steam at 800 °C:
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Physical properties
Yttrium oxyfluoride forms colorless crystals of tetragonal crystal system; its cell parameters are: a = 0.3910 nm, c = 0.5431 nm. According to hexagonal crystal family, the cell parameters are: a = 0.38727 nm, c = 1.897 nm, Z = 6.
Applications
Stable yttrium oxyfluoride material is used for inner walls of plasma process equipment.[4][5]
References
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