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Molybdenum hexafluoride
Chemical compound From Wikipedia, the free encyclopedia
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Molybdenum hexafluoride, also molybdenum(VI) fluoride, is an inorganic compound with the formula MoF6. It is the fluoride of molybdenum in its highest oxidation state of +6. It is a colourless solid that melts just below room temperature and boils at 34 °C.[3] It is one of the seventeen known binary hexafluorides.
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Synthesis
Molybdenum hexafluoride is made by direct reaction of molybdenum metal in an excess of elemental fluorine:[2]
- Mo + 3 F2 → MoF6
The compound hydrolyzes easily,[4] and typical impurities are MoO2F2 and MoOF4.[5]
Description
At −140 °C, it crystallizes in the orthorhombic space group Pnma. Lattice parameters are a = 9.394 Å, b = 8.543 Å, and c = 4.959 Å. There are four formula units (in this case, discrete molecules) per unit cell, giving a density of 3.50 g·cm−3.[2] The fluorine atoms are arranged in the hexagonal close packing.[6]
In liquid and gas phase, MoF6 adopt octahedral molecular geometry with point group Oh. The Mo–F bond length is 1.817 Å.[2]
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Applications
Molybdenum hexafluoride has few uses. In the nuclear industry, MoF6 occurs as an impurity in uranium hexafluoride since molybdenum is a fission product of uranium.
The semiconductor industry constructs various integrated circuits through chemical vapor deposition of molybdenum hexafluoride.[4] In some cases, the deposited molybdenum is an impurity in the intended tungsten hexafluoride. MoF6 can be removed by reduction of a WF6-MoF6 mixture with any of a number of elements including hydrogen iodide at moderately elevated temperature.[7][8]
References
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